SL1-F1_wmcSL1-F1

(SL1-F1) Electrical Hook up Installation Acceptance & Turn on Check List
(SL1-F1) 電氣連接安裝驗收與啟動檢查清單

tool ID: 工具識別碼：		Location ID: 位置識別碼：	Facility Code: 設施代碼：	Process Function: 處理功能：		Date: 日期：
No. 編號：	Check item 檢查項目			Responsible 負責	verified(Y/N/NA) 已驗證(Y/N/NA)	remark 備註	Critical 關鍵
1	Is it constructed in accordance with the tsmc tool hook up CAD drawing? 是否依據台積電工具連接的 CAD 圖紙進行建造？			vendor 供應商			NC
2	Is the AC box grounding properly connected? Is the wiring in the panel properly configured? AC 箱的接地是否正確連接？面板內的接線是否正確配置？			vendor 供應商			C
3	Is a cover attached to the end of the Support without sharp edges and corners and burrs? 支撐的末端是否附有沒有銳利邊緣和角落及毛刺的蓋子？			vendor 供應商			NC
4	Are the bolts of AC box, breaker and process tool securely tightened? AC 箱、斷路器和工藝工具的螺栓是否緊固牢固？			vendor 供應商			NC
5	Is the AC box waterproof? AC 箱是防水的嗎？			vendor 供應商			NC
6	Are pipeline identification labels posted in accordance with tsmc rules? 管道識別標籤是否依照台積電的規定張貼？			vendor 供應商			NC
7	Will the work area be cleaned up after the work is completed? 工作區域在工作完成後會被清理嗎？			vendor 供應商			NC
8	Is it a positive phase sequence? 這是正相序嗎？			vendor 供應商			C
9	Whether the fixed tripod of the receiving end equipment is tightly locked 接收端設備的固定三腳架是否緊密鎖定			vendor 供應商			C
10	Is the cable pipe fire-proof packing well protected? 電纜管的防火包裝是否得到良好保護？			vendor 供應商			C
11	Whether the tinned conduc to $r$ inside the tool (silver shiny surface) and insulation protection between the conduc to rs (add heat shrinkable sleeve or insulating partition) 是否在工具內部的導體 $r$ （銀色光亮表面）和導體之間的絕緣保護（添加熱縮套管或絕緣隔板）			tsmc			C
12	Is the tool Internal UPS on the power supply circuit of the fab CUPS removed? 工具內部的 UPS 是否已從廠房 CUPS 的電源電路中移除？			tsmc			C
13	GE Plug-in inspection items GE 插頭檢查項目
13.1	Does the alignment pin protrude $> 30 mm$ ? 對齊銷是否突出 $> 30 mm$ ？			vendor 供應商			C
13.2	Are the 4 fixing hook screws tightened with a 5 N-M Phillips screwdriver? 4 顆固定鉤螺絲是否使用 5 N-M 的十字螺絲刀緊固？			vendor 供應商			C
13.3	The distance between switch box and busbar is $42 mm \pm 1 mm$ inspection 開關箱與母線之間的距離為 $42 mm \pm 1 mm$ 檢查			vendor 供應商			C
13.4	$3 Φ 5 W$ (RSTNG) system: Use a three-meter ohm meter to measure whether the N-G phase of AC Box is turned on before PIU is powered on? (Avoid N-phase open-circuit power supply) $3 Φ 5 W$ (RSTNG) 系統：在 PIU 通電之前，使用三米歐姆計測量 AC Box 的 N-G 相是否已開啟？（避免 N 相開路供電）			vendor 供應商			C
14	Confirm that the upstream branch load is less than 80% after the new load 確認新負載後，上游分支的負載低於 80%			tsmc 台積電			C
15	cable identification for multicable per phase continuity check was completed 每相連續性檢查的多電纜識別已完成			vendor 供應商		the cable identification is color-coded, phase is distinguished by tape identification. Color identification code must be available on site for QC representative to check 電纜識別是以顏色編碼，相位由膠帶識別。顏色識別代碼必須在現場提供，以便 QC 代表檢查	C
16	multicable per phase continuity QC check was done before power on 每相的多電纜連續性 QC 檢查在通電前已完成			vendor 供應商		connection between different panels need to be completed before multicable per phase continuity, QC need to complete 不同面板之間的連接需要在每相多纜連續性之前完成，QC 需要完成	C
17	Is the power cable of PIU secondary side locked, & the screws torquing correctly? PIU 次側的電源線是否已鎖定，螺絲扭矩是否正確？			tsmc

tool ID: Location ID: Facility Code: Process Function: Date: No. Check item Responsible verified(Y/N/NA) remark Critical 1 Is it constructed in accordance with the tsmc tool hook up CAD drawing? vendor NC 2 Is the AC box grounding properly connected? Is the wiring in the panel properly configured? vendor C 3 Is a cover attached to the end of the Support without sharp edges and corners and burrs? vendor NC 4 Are the bolts of AC box, breaker and process tool securely tightened? vendor NC 5 Is the AC box waterproof? vendor NC 6 Are pipeline identification labels posted in accordance with tsmc rules? vendor NC 7 Will the work area be cleaned up after the work is completed? vendor NC 8 Is it a positive phase sequence? vendor C 9 Whether the fixed tripod of the receiving end equipment is tightly locked vendor C 10 Is the cable pipe fire-proof packing well protected? vendor C 11 Whether the tinned conduc to r inside the tool (silver shiny surface) and insulation protection between the conduc to rs (add heat shrinkable sleeve or insulating partition) tsmc C 12 Is the tool Internal UPS on the power supply circuit of the fab CUPS removed? tsmc C 13 GE Plug-in inspection items 13.1 Does the alignment pin protrude > 30mm ? vendor C 13.2 Are the 4 fixing hook screws tightened with a 5 N-M Phillips screwdriver? vendor C 13.3 The distance between switch box and busbar is 42mm+-1mm inspection vendor C 13.4 3Phi5W (RSTNG) system: Use a three-meter ohm meter to measure whether the N-G phase of AC Box is turned on before PIU is powered on? (Avoid N-phase open-circuit power supply) vendor C 14 Confirm that the upstream branch load is less than 80% after the new load tsmc C 15 cable identification for multicable per phase continuity check was completed vendor the cable identification is color-coded, phase is distinguished by tape identification. Color identification code must be available on site for QC representative to check C 16 multicable per phase continuity QC check was done before power on vendor connection between different panels need to be completed before multicable per phase continuity, QC need to complete C 17 Is the power cable of PIU secondary side locked, & the screws torquing correctly? tsmc

| tool ID: | | Location ID: | Facility Code: | Process Function: | | Date: | | | :--- | :--- | :--- | :--- | :--- | :--- | :--- | :--- | | No. | Check item | | | Responsible | verified(Y/N/NA) | remark | Critical | | 1 | Is it constructed in accordance with the tsmc tool hook up CAD drawing? | | | vendor | | | NC | | 2 | Is the AC box grounding properly connected? Is the wiring in the panel properly configured? | | | vendor | | | C | | 3 | Is a cover attached to the end of the Support without sharp edges and corners and burrs? | | | vendor | | | NC | | 4 | Are the bolts of AC box, breaker and process tool securely tightened? | | | vendor | | | NC | | 5 | Is the AC box waterproof? | | | vendor | | | NC | | 6 | Are pipeline identification labels posted in accordance with tsmc rules? | | | vendor | | | NC | | 7 | Will the work area be cleaned up after the work is completed? | | | vendor | | | NC | | 8 | Is it a positive phase sequence? | | | vendor | | | C | | 9 | Whether the fixed tripod of the receiving end equipment is tightly locked | | | vendor | | | C | | 10 | Is the cable pipe fire-proof packing well protected? | | | vendor | | | C | | 11 | Whether the tinned conduc to $r$ inside the tool (silver shiny surface) and insulation protection between the conduc to rs (add heat shrinkable sleeve or insulating partition) | | | tsmc | | | C | | 12 | Is the tool Internal UPS on the power supply circuit of the fab CUPS removed? | | | tsmc | | | C | | 13 | GE Plug-in inspection items | | | | | | | | 13.1 | Does the alignment pin protrude $>30 \mathrm{~mm}$ ? | | | vendor | | | C | | 13.2 | Are the 4 fixing hook screws tightened with a 5 N-M Phillips screwdriver? | | | vendor | | | C | | 13.3 | The distance between switch box and busbar is $42 \mathrm{~mm} \pm 1 \mathrm{~mm}$ inspection | | | vendor | | | C | | 13.4 | $3 \Phi 5 \mathrm{~W}$ (RSTNG) system: Use a three-meter ohm meter to measure whether the N-G phase of AC Box is turned on before PIU is powered on? (Avoid N-phase open-circuit power supply) | | | vendor | | | C | | 14 | Confirm that the upstream branch load is less than 80% after the new load | | | tsmc | | | C | | 15 | cable identification for multicable per phase continuity check was completed | | | vendor | | the cable identification is color-coded, phase is distinguished by tape identification. Color identification code must be available on site for QC representative to check | C | | 16 | multicable per phase continuity QC check was done before power on | | | vendor | | connection between different panels need to be completed before multicable per phase continuity, QC need to complete | C | | 17 | Is the power cable of PIU secondary side locked, & the screws torquing correctly? | | | tsmc | | | |

Source ID 來源 ID

AC Box AC 盒子

Screw torque value (N-m)
螺絲扭矩值 (N-m)

Breaker rate (A) 斷路器額定值 (A)

Voltage (RS) 電壓 (RS)

Voltage (ST) 電壓 (ST)

Voltage (TR) 電壓 (TR)

Voltage (RN) 電壓 (RN)

Voltage (SN) 電壓 (SN)

Voltage (TN) 電壓 (TN)

Voltage (RG) 電壓 (RG)

Voltage (SG) 電壓 (SG)

Voltage (TG) 電壓 (TG)

Cable Size 電纜尺寸

Isolation (MOhm) 絕緣 (MOhm)

Phase Sequence 相序

2 N

service request form (FSR)
服務請求表單 (FSR)
Contractor QC / Date :
承包商 QC / 日期：
Contractor Supervisor/Date :
承包商監督 / 日期：
TSMC Contrac to r Owner / Date :

台積電承包商負責人 / 日期：